Spatial light modulator-based maskless laser lithography using Fourier filtering and focal shift

Ulm, Andreas (Corresponding author); Ahmed, Mirza Tareq; Schmitt, Robert H.

Bristol : IOP Publ. (2022)
Journal Article

In: Journal of physics / D
Volume: 56
Issue: 3
Page(s)/Article-Nr.: 035102

Institutions

• Fraunhofer Institute for Production Technology [053200]
• Laboratory for Machine Tools and Production Engineering (WZL) of RWTH Aachen University [417200]
• Chair of Production Metrology and Quality Management [417510]