Spatial light modulator-based maskless laser lithography using Fourier filtering and focal shift
Ulm, Andreas (Corresponding author); Ahmed, Mirza Tareq; Schmitt, Robert H.
Bristol : IOP Publ. (2022)
Journal Article
In: Journal of physics / D
Volume: 56
Issue: 3
Page(s)/Article-Nr.: 035102
Institutions
- Fraunhofer Institute for Production Technology [053200]
- Laboratory for Machine Tools and Production Engineering (WZL) of RWTH Aachen University [417200]
- Chair of Production Metrology and Quality Management [417510]
Identifier
- DOI: 10.1088/1361-6463/aca2b8
- DOI: 10.18154/RWTH-2023-00011
- RWTH PUBLICATIONS: RWTH-2023-00011