Model-based interfacing of large-scale metrology instruments

Bellingham, Washington, USA / SPIE (2019) [Contribution to a book, Contribution to a conference proceedings]

Multimodal Sensing: Technologies and Applications : SPIE optical metrology ; 24-27 June 2019 / Editor(s): Ettore Stella
Page(s): 10 Seiten

Authors

Authors

Montavon, Benjamin Leendert
Peterek, Martin
Schmitt, Robert H.

Identifier