Model-based interfacing of large-scale metrology instruments

Montavon, Benjamin Leendert (Corresponding author); Peterek, Martin Joachim; Schmitt, Robert H.

Bellingham, Washington, USA : SPIE (2019)
Contribution to a book, Contribution to a conference proceedings

In: Multimodal Sensing: Technologies and Applications : SPIE optical metrology ; 24-27 June 2019 / Editor(s): Ettore Stella
Page(s)/Article-Nr.: 10 Seiten

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