Investigation on Wire-EDM Finishing of Titanium Nitride Doped Silicon Nitride in CH-based Dielectrics

Red Hook, NY / Curran (2018) [Contribution to a conference proceedings, Journal Article]

Procedia CIRP
Volume: 77
Page(s): 650-653


Selected Authors

Klocke, Fritz
Olivier, Marcel Christoph
Degenhardt, U.
Herrig, Tim
Tombul, Ugur

Other Authors

Klink, Andreas


  • REPORT NUMBER: RWTH-2019-01421