Investigation on Wire-EDM Finishing of Titanium Nitride Doped Silicon Nitride in CH-based Dielectrics

Klocke, Fritz; Olivier, Marcel Christoph; Degenhardt, U.; Herrig, Tim; Tombul, Ugur; Klink, Andreas

Red Hook, NY : Curran (2018)
Contribution to a conference proceedings, Journal Article

In: Procedia CIRP
Volume: 77
Page(s)/Article-Nr.: 650-653

Identifier