Investigation on Wire-EDM Finishing of Titanium Nitride Doped Silicon Nitride in CH-based Dielectrics

Amsterdam [u.a.] / Elsevier (2018) [Contribution to a conference proceedings, Journal Article]

Procedia CIRP
Volume: 77
Page(s): 650-653

Authors

Selected Authors

Klocke, Fritz
Olivier, Marcel Christoph
Degenhardt, U.
Herrig, Tim
Tombul, Ugur

Other Authors

Klink, Andreas

Identifier

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