Investigation on Wire-EDM Finishing of Titanium Nitride Doped Silicon Nitride in CH-based Dielectrics

Klocke, Fritz; Olivier, Marcel Christoph (Corresponding author); Degenhardt, U.; Herrig, Tim; Tombul, Ugur; Klink, Andreas

Amsterdam [u.a.] / Elsevier (2018) [Contribution to a conference proceedings, Journal Article]

Procedia CIRP
Volume: 77
Page(s): 650-653

Identifier

Downloads