Underlying Mechanisms for Developing Process Signatures in Manufacturing

Brinksmeier, E. (Corresponding author); Reese, Stefanie; Klink, Andreas; Langenhorst, L.; Lübben, T.; Meinke, Matthias; Meyer, D.; Riemer, O.; Sölter, J.

Singapore] / Springer Singapore (2018) [Journal Article]

Nanomanufacturing and Metrology
Volume: 1
Issue: 4
Page(s): 193-208

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