High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control

Bedford / euspen (2017) [Contribution to a book, Contribution to a conference proceedings, Poster]

Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology : May 29th-2nd June 2017, Hannover, DE / editors: D. Billington, D. Phillips ; proceedings compilation: V. Crabb, L. Delimata, C. Nisbet, J. Norman ; euspen
Page(s): 417-420

Authors

Selected Authors

Folkersma, K. G. P.
Woldering, L. A.
Voss, K. H. J.
Pohl, R.
Resink, S. G.

Other Authors

Kunze, Rouwen
Bredol, Philipp
Schmitt, Robert H.
Klein, M. E.
Borreman, A.
de Hoon, C. J. A.

Identifier

  • REPORT NUMBER: RWTH-2018-223183