High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control

Folkersma, K. G. P.; Woldering, L. A.; Voss, K. H. J.; Pohl, R.; Resink, S. G.; Kunze, Rouwen; Bredol, Philipp; Schmitt, Robert H.; Klein, M. E.; Borreman, A.; de Hoon, C. J. A.

Bedford / euspen (2017) [Contribution to a book, Contribution to a conference proceedings, Poster]

Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology : May 29th-2nd June 2017, Hannover, DE / editors: D. Billington, D. Phillips ; proceedings compilation: V. Crabb, L. Delimata, C. Nisbet, J. Norman ; euspen
Page(s): 417-420


  • REPORT NUMBER: RWTH-2018-223183