Inline surface topography measurements of ultrashort laser pulsed manufactured micro structures based on low coherence interferometry : Inline low coherence interferometry measurement system characterization and performance test

Berlin / De Gruyter (2017) [Journal Article]

Technisches Messen : tm
Volume: 84
Issue: 9
Page(s): 575-586

Authors

Authors

Kunze, Rouwen
Schmitt, Robert H.

Identifier