Inline surface topography measurements of ultrashort laser pulsed manufactured micro structures based on low coherence interferometry : Inline low coherence interferometry measurement system characterization and performance test

Kunze, Rouwen (Corresponding author); Schmitt, Robert H.

Berlin : De Gruyter (2017)
Journal Article

In: Technisches Messen : tm
Volume: 84
Issue: 9
Page(s)/Article-Nr.: 575-586

Identifier